发明名称 MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS, AND METHOD FOR THE PRODUCTION OF A SENSOR ELEMENT FOR THE MEASURING PROBE
摘要 The invention relates to a measuring probe for measuring the thickness of thin layers with a housing (14), having at least one sensor element (17), which is received in the housing (14) at least slightly moveably along a longitudinal axis (16) and which comprises at least one winding device (44), which is allocated to the longitudinal axis (16), having a spherical positioning cap (21) facing the outer front face of the housing (14), said cap being arranged in the longitudinal axis (16), wherein the spherical positioning cap (21) has a basic body (55) that has a cylindrical core section (56) and a pol cap (58) arranged on a front face of the core section (56), wherein the winding device (44) is allocated to the spherical positioning cap (21), said winding device being formed from a discoidal or annular carrier (49) with at least one Archimedean coil (51) arranged thereon and with the basic body (55) consisting of a ferritic material and the pol cap consisting of a hard metal.
申请公布号 EP2715335(A1) 申请公布日期 2014.04.09
申请号 EP20120726767 申请日期 2012.05.24
申请人 HELMUT FISCHER GMBH INSTITUT FUER ELEKTRONIK UND MESSTECHNIK. 发明人 FISCHER, HELMUT
分类号 G01N27/90;G01B7/06 主分类号 G01N27/90
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