发明名称 |
METHODS AND APPARATUS FOR UNIFORMLY METALLIZATION ON SUBSTRATES |
摘要 |
An apparatus for substrate metallization from electrolyte is provided. The apparatus comprises: an immersion cell containing metal salt electrolyte; at least one electrode connecting to at least one power supply; an electrically conductive substrate holder holding at least one substrate to expose a conductive side of the substrate to face the at least one electrode; an oscillating actuator for oscillating the substrate holder with an amplitude and a frequency; at least one ultrasonic device with an operating frequency and an intensity, disposed in the metallization apparatus; at least one ultrasonic power generator connecting to the ultrasonic device; at least one inlet for metal slat electrolyte feeding; and at least one outlet for metal salt electrolyte draining. |
申请公布号 |
KR20140043445(A) |
申请公布日期 |
2014.04.09 |
申请号 |
KR20147001808 |
申请日期 |
2011.06.24 |
申请人 |
ACM RESEARCH (SHANGHAI) INC. |
发明人 |
WANG HUI;MA YUE;HE CHUAN;WANG XI |
分类号 |
C25D5/02;C25D5/16 |
主分类号 |
C25D5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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