发明名称 |
PROCESSES FOR SUPPRESSING MINORITY CARRIER LIFETIME DEGRADATION IN SILICON WAFERS |
摘要 |
<p>Processes for suppressing minority carrier lifetime degradation in silicon wafers are disclosed. The processes involve quench cooling the wafers to increase the density of nano-precipitates in the silicon wafers and the rate at which interstitial atoms are consumed by the nano-precipitates.</p> |
申请公布号 |
EP2715805(A1) |
申请公布日期 |
2014.04.09 |
申请号 |
EP20120726561 |
申请日期 |
2012.06.01 |
申请人 |
MEMC SINGAPORE PTE. LTD. |
发明人 |
FALSTER, ROBERT J.;VORONKOV, VLADIMIR V. |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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