发明名称 |
METHOD FOR MANUFACTURING LIGHT-EMITTING ELEMENT, AND LIGHT-EMITTING ELEMENT |
摘要 |
<p>To eliminate damage to a light-emitting element layer caused by the formation of a vertical hole to be formed in a monocrystalline substrate when manufacturing a light-emitting element. Provided are a method of manufacturing a light-emitting element by which a light-emitting element (80) is manufactured through the following steps and a light-emitting element manufactured by employing the method. A light-emitting element layer (40) is formed on one face (32T) of a monocrystalline substrate (30A) for a light-emitting element. Next, the other face (32B) of the monocrystalline substrate (30A) for a light-emitting element is polished until a state where a vertical hole (34A) penetrates the monocrystalline substrate (30A) for a light-emitting element in its thickness direction is established. Next, a conductive material is filled into the vertical hole (34B) from the side of the vertical hole (34B) closer to an opening (36B) in the other face (32B) to form a conductive portion (50) that is continuous from a side closer to the light-emitting element layer (40) to the opening (36B) in the other face (32B).</p> |
申请公布号 |
EP2717335(A1) |
申请公布日期 |
2014.04.09 |
申请号 |
EP20120789367 |
申请日期 |
2012.04.03 |
申请人 |
NAMIKI SEIMITU HOUSEKI KABUSHIKI KAISHA;DISCO CORPORATION |
发明人 |
AIDA, HIDEO;AOTA, NATSUKO;TAKEDA, HIDETOSHI;HONJO, KEIJI;HOSHINO, HITOSHI |
分类号 |
H01L33/38;H01L21/205;H01L21/306;H01L33/00 |
主分类号 |
H01L33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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