| 摘要 |
The system (2) has a line (8) for introducing gas into an ion source (4), and another two lines (10, 12) for two separate gas flows. A multi-path switching valve (6) e.g. 2-position-4-way valve, comprises an inlet (17a) and an outlet (17b), where the latter two lines (10, 12) flows into the inlet of the switching valve. The former line is connected to the outlet of the switching valve. The switching valve is designed in such a manner that the inlet is connected to the outlet, so that either one of the two latter lines is connected in flow relationship with the former line. An independent claim is also included for a method for operating a gas injection system. |
