发明名称 Interferometer
摘要 An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source (LD) into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit (PDC) including a light-receiving area including a plurality of partial areas (PDC1-PDC4) and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit (RVR) configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.
申请公布号 EP2392900(A3) 申请公布日期 2014.04.09
申请号 EP20110164038 申请日期 2011.04.28
申请人 CANON KABUSHIKI KAISHA 发明人 ISHIZUKA, KO;SASAKI, RYO;MASEGI, KOICHI
分类号 G01D5/26 主分类号 G01D5/26
代理机构 代理人
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