发明名称 |
LASER MATERIAL PROCESSING SYSTEM |
摘要 |
<p>A laser processing apparatus comprises a converging lens 31 for converging processing laser light and rangefinding laser light L2 toward a wafer 1, an actuator for actuating the lens 31, a shaping optical system 49 for adding astigmatism to reflected light L3 of the rangefinding laser light, a quadrant photodiode 42 for receiving the reflected light L3 and outputting voltage values corresponding to its light quantities, and a controller for regulating the actuator, and positions a converging point P2 of the rangefinding laser light L2 between a focal point P0 of the lens and the lens 31, so as to make it possible to form a modified region at a position deeper from the front face 3, thereby suppressing adverse effects due to the reflected light L3. The control is based on an arithmetic value subjected to a division by a sum of the voltage values, so as to prevent the arithmetic value from being changed by the quantity of reflected light.</p> |
申请公布号 |
EP1970155(B1) |
申请公布日期 |
2014.04.09 |
申请号 |
EP20060834505 |
申请日期 |
2006.12.12 |
申请人 |
HAMAMATSU PHOTONICS K. K. |
发明人 |
KUNO, KOJI;MURAMATSU, KENICHI;ATSUMI, KAZUHIRO;OSAJIMA, TETSUYA |
分类号 |
B23K26/04;B23K26/00;B23K26/38;B23K26/40;B23K101/40;H01L21/301 |
主分类号 |
B23K26/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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