| 摘要 |
PROBLEM TO BE SOLVED: To maintain operability similar to that of a manually-operated stage and enable a reliable manual operation in moving an electric stage that uses an ultrasonic motor as a driving source, using a manual input device. SOLUTION: An operation part 24 included in a stage controller calculates a target position Xt, a target moving distance D, and a target velocity Vt (=αD/Ts (α<1)) based on an output signal of a manual input device 15 and a linear encoder 14 for each sampling interval Ts, and performs control so as to move a stage 12 at the target velocity Vt. When a stage position Xa is compared to the target position Xt at an arbitrary point and a conditional expression ¾Xt-Xa¾<Δd is met, or when an output signal of the manual input device 15 captured for each sampling interval Ts corresponds to a zero moving amount a predetermined number of times in a row, control is performed so as to stop the stage 12 and the target position Xt is updated using the current target position Xt as the current stage position. COPYRIGHT: (C)2011,JPO&INPIT |
