Systems, apparatus and methods for making an electrical connection to a robot

摘要

Systems, apparatus and methods are disclosed for allowing electrical connection to a robot apparatus. In one aspect, an electrical coupling is adapted to provide electrical power to the robot apparatus in the vacuum chamber. The electrical coupling may include engaging electrical contacts. In some embodiments, at least one of the contacts may be suspended relative to a spring such that the engaging contacts do not rotate relative to each other during arm rotation of the robot. In other embodiments, inductively coupled coils are included. Numerous other aspects are provided.