发明名称 UBM structures for wafer level chip scale packaging
摘要 A wafer level chip scale semiconductor device comprises a semiconductor die, a first under bump metal structure and a second under bump metal structure. The first under bump metal structure having a first enclosure is formed on a corner region or an edge region of the semiconductor die. A second under bump metal structure having a second enclosure is formed on an inner region of the semiconductor die. The first enclosure is greater than the second enclosure.
申请公布号 US8692378(B2) 申请公布日期 2014.04.08
申请号 US201113312538 申请日期 2011.12.06
申请人 YU TSUNG-YUAN;CHEN HSIEN-WEI;CHEN YING-JU;LIANG SHIH-WEI;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 YU TSUNG-YUAN;CHEN HSIEN-WEI;CHEN YING-JU;LIANG SHIH-WEI
分类号 H01L23/34 主分类号 H01L23/34
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