发明名称 Apparatus and method for microelectromechanical systems device packaging
摘要 A MEMS package includes a substrate having an L-shaped cross-section. The substrate includes a vertical portion having a front surface and a back surface, and a horizontal portion protruding from a lower part of the front surface of the vertical portion, wherein the front surface of the vertical portion includes a mounting region. A MEMS die is mounted on the mounting region such that the MEMS die is oriented substantially parallel to the front surface; a lid attached to the front surface of the substrate while covering the MEMS die; and a plurality of leads formed on a bottom surface of the substrate. The leads can extend substantially parallel to one another, and substantially perpendicular to the front surface. The MEMS die can be oriented substantially perpendicular to a PCB substrate on which the package is mounted.
申请公布号 US8692366(B2) 申请公布日期 2014.04.08
申请号 US201113085294 申请日期 2011.04.12
申请人 XUE XIAOJIE;RALEIGH CARL;ANALOG DEVICE, INC. 发明人 XUE XIAOJIE;RALEIGH CARL
分类号 H01L23/48 主分类号 H01L23/48
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