发明名称 Semiconductor devices and structures including at least partially formed container capacitors
摘要 Semiconductor device structures include an at least partially formed container capacitor having a generally cylindrical first conductive member with at least one inner sidewall surface, a lattice material at least partially laterally surrounding an upper end portion of the first conductive member, an anchor material, and at least one aperture extending through the lattice material between the at least partially formed container capacitor and an adjacent at least partially formed container capacitor. Other structures include an at least partially formed container capacitor, a lattice material, and an anchor material disposed over a surface of the lattice material and at least a portion of an end surface of the first conductive member and forming a chemical barrier over at least a portion of an interface between the lattice material and the upper end portion of the first conductive member.
申请公布号 US8692305(B2) 申请公布日期 2014.04.08
申请号 US201113286702 申请日期 2011.11.01
申请人 BUSCH BRETT;SHEA KEVIN R.;FIGURA THOMAS A.;MICRON TECHNOLOGY, INC. 发明人 BUSCH BRETT;SHEA KEVIN R.;FIGURA THOMAS A.
分类号 H01L27/108;H01L29/94 主分类号 H01L27/108
代理机构 代理人
主权项
地址