发明名称 Method of forming a composite laser substrate
摘要 A composite substrate for laser devices is disclosed having improved wave guiding properties, improved lattice matching, improved thermal expansion matching, and improved thermal conductivity. The composite substrate has an intermediate layer formed on a support substrate, and a seed layer formed on the intermediate layer. An active device layer is grown or attached to the seed layer, or to a light confinement layer on the seed layer. The intermediate layer may be formed directly on the support layer, or may be formed by thinning an attached wafer of the intermediate material, which is then thinned to a desired thickness.
申请公布号 US8692260(B2) 申请公布日期 2014.04.08
申请号 US200913001734 申请日期 2009.09.21
申请人 ARENA CHANTAL;WERKHOVEN CHRISTIAAN J.;SOITEC 发明人 ARENA CHANTAL;WERKHOVEN CHRISTIAAN J.
分类号 H01L29/20;H01L33/30 主分类号 H01L29/20
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