发明名称 Metal structure for memory device
摘要 A semiconductor device is provided that includes a substrate, a static random access memory (SRAM) unit cell formed in the substrate, a first metal layer formed over the substrate the first metal layer providing local interconnection to the SRAM unit cell, a second metal layer formed over the first metal layer, the second metal layer including: a bit line and a complementary bit line each having a first thickness and a Vcc line disposed between the bit line and the complementary bit line, and a third metal layer formed over the second metal layer, the third metal layer including a word line having a second thickness greater than the first thickness.
申请公布号 US8691633(B2) 申请公布日期 2014.04.08
申请号 US201313774797 申请日期 2013.02.22
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIAW JHON JHY
分类号 H01L21/70 主分类号 H01L21/70
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