发明名称 |
Gas sensor materials and methods for preparation thereof |
摘要 |
Gas sensor materials and methods are disclosed for preparing and using the same to produce gas sensor structures. Also disclosed are gas sensor structures and systems that employ these disclosed materials. A gas sense-enhancing metal such as platinum may be added to a gas sensitive metal oxide material in a manner that more highly disperses the added platinum than conventional methods so as to more effectively utilize the platinum at a lower concentration, thus achieving a more cost effective solution. An ink vehicle may also be used for deposition of a gas sensitive material (e.g. on the surface of integrated circuit) that is formulated to allow“burn-out”of ink vehicle components at relatively low temperatures as compared to conventional ink vehicles. |
申请公布号 |
US8691609(B1) |
申请公布日期 |
2014.04.08 |
申请号 |
US201113250849 |
申请日期 |
2011.09.30 |
申请人 |
SMITH PETER;BLAKE JANE;CAVANAGH LEON;SPEER RAYMOND;SILICON LABORATORIES INC. |
发明人 |
SMITH PETER;BLAKE JANE;CAVANAGH LEON;SPEER RAYMOND |
分类号 |
H01L21/66;G01N27/414 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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