发明名称 Vision inspection method for Vision inspection equipment
摘要 PURPOSE: A vision inspection method for vision inspection apparatus is provided to obtain accurate measurement by securing a clear outline through a backlight method in inspection of the height of the material. CONSTITUTION: In a device, a side vision includes 4 prisms(11), a prism fixing block, four lights(12), and a vision camera(13). The prism is installed at four of a material(10). The prism fixing block supports the prism. The lights is arranged on circumference of the prism. The vision camera is arranged at the lower part of the material in order to take a picture of the material. A picker(14) picks up the material and place it within a range of the side vision. The vision camera inspect the surface and height of the material.
申请公布号 KR101380653(B1) 申请公布日期 2014.04.04
申请号 KR20080055036 申请日期 2008.06.12
申请人 发明人
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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