| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment apparatus which allows for safety leakage check while suppressing increase in the facility cost, by forming a leakage check gas by using the existing hydrogen gas supply system and nitrogen gas supply system in the apparatus.SOLUTION: A thermal treatment apparatus performing thermal treatment of a workpiece under normal pressure comprises: a processing container; holding means; heating means for heating the workpiece; gas supply means having at least a hydrogen gas supply system and a nitrogen gas supply system joined to the gas introduction part of the processing container on the downstream side; an exhaust system joined to the exhaust port of the processing container on the upstream side and connected with the factory duct side on the downstream side; and a gas control unit for controlling the gas supply means so that a mixed gas of hydrogen gas and nitrogen gas, where the concentration of hydrogen gas is within a predetermined range during leakage check at the joint, is formed as the leakage check gas. |
