CHARGED PARTICLE RADIATION DEVICE

摘要

Conventional charged particle radiation devices assumed that signals were detected while a sample is close to a diaphragm, and thus were not appropriate for observing samples that are extremely uneven in a gas atmosphere having an atmospheric pressure or a pressure that is approximately the same as atmospheric pressure. The present invention is a charged particle radiation device provided with a detachable diaphragm which allows primary charged particle beams to permeate or pass therethrough and which is disposed so as to separate a charged particle optical lens barrel from a space in which a sample is placed, wherein a detector for detecting secondary particles emitted from the sample as a consequence of being irradiated with the primary charged particle beams is disposed within the space in which the sample is placed.