PIEZOELECTRIC ELEMENT, DROPLET DISCHARGE HEAD, LIQUID CARTRIDGE, AND DROPLET DISCHARGE RECORDING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of a leak current between an upper electrode and a lower electrode in a piezoelectric element.SOLUTION: A piezoelectric element 116 includes: a lower electrode 117; a piezoelectric material 118 which is disposed on the lower electrode 117; and an upper electrode 119 disposed on the piezoelectric material 118. The upper electrode 119 has an upper surface area smaller than an upper surface area of the piezoelectric material 118 and is disposed so as to be spaced away from a side surface of the piezoelectric material 118. The piezoelectric material 118 includes a recessed part 130, which is disposed enclosing a periphery of the upper electrode 119, on its upper surface. A bottom surface of the recessed part 130 is located adjacent to the side surface of the piezoelectric material 118. A conductive etching product material 131 created during patterning of the upper electrode 119 exists at a region of the upper surface of the piezoelectric material 118 and a side surface of the upper electrode 119 which are located between the upper electrode 119 and the recessed part 130. The etching product material 131 is not formed in the recessed part 130.