| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor ring laser apparatus capable of obtaining stable oscillation of ring laser, highly accurately detecting angular velocity and having extremely small size and extremely light weight.SOLUTION: The semiconductor ring laser apparatus comprises: one Si semiconductor substrate 10; a ring resonator 20 including an optical waveguide 21 formed on the Si semiconductor substrate 10; a semiconductor laser part 2 having a light-emitting amplification part 2A on at least a part of the optical waveguide 21 and generating two laser beams L1, L2 circulating around the ring resonator 20 in a direction opposite to each other; and a light detection part 4 formed on the Si semiconductor substrate 10, extracting the two laser beams L1, L2 from the ring resonator 20 and detecting a frequency difference between the two laser beams L1, L2. The light-emitting amplification part 2A has a pn junction part 13a that is obtained by annealing and simultaneously irradiating with light a second semiconductor layer 13 obtained by performing high concentration doping of B (boron) to a first semiconductor layer 10n on the Si semiconductor substrate 10. |
