发明名称 |
SHOWERHEAD ELECTRODE ASSEMBLY IN A CAPACATIVELY COUPLED PLASMA PROCESSING APPARATUS |
摘要 |
A showerhead electrode assembly for use in a capacitively coupled plasma processing apparatus includes a heat transfer plate. The heat transfer plate includes independently controllable gas volumes which are pressurized to locally control thermal conductance between a heater member and a cooler member for obtaining uniform temperatures on the plasma exposed surface of the showerhead electrode assembly. |
申请公布号 |
KR20140040655(A) |
申请公布日期 |
2014.04.03 |
申请号 |
KR20130113237 |
申请日期 |
2013.09.24 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
NAM, SANG KI;DHINDSA RAJINDER;BISE RYAN |
分类号 |
H05H1/34 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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