| 摘要 |
PROBLEM TO BE SOLVED: To provide a system in which electron microscope image is facilitated in a helium environment.SOLUTION: In an electron microscope 100, a volume part 116 capable of high helium concentration is provided in the vicinity of an optical axis 106 in the outside of a vacuum chamber 104, to which a helium supply assembly 110 selectably supplies helium during imaging. A sample 122 is supported by a stage 124 on the outside of the vacuum chamber 104 and can be carried into and carried out from the volume part 116 capable of high helium concentration by a translational moving assembly 124 during imaging. |
