| 摘要 |
A thickness inspection device comprises a capacitance detector (4) for detecting capacitance in a region subject to thickness inspection and an arithmetic control unit for fetching the capacitance detected by the capacitance detector (4) and executing a process to convert same to a thickness. The capacitance detector (4) has a sensor part (5) in contact with the surface of the region for thickness inspection and an elastic body (6) for biasing the sensor part (5) toward the target region. The sensor part (5) has a curved face (50) with a radius of curvature (R) of 2 mm ≤ R ≤ 10 mm, and the curved face (50) is formed by adhering, onto a strip-shaped mounting substrate (51), a synthetic resin electrode sheet (7) on which electrode patterns are represented so that, from an electrode pattern for a measurement electrode and an electrode pattern of a ground electrode, at least the electrode pattern of a measurement electrode is positioned on the surface of a curved portion of the mounting substrate (51). |
