发明名称 SEMICONDUCTOR DEVICE, SEMICONDUCTOR WAFER, METHOD FOR PRODUCING SEMICONDUCTOR WAFER, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 Provided is a semiconductor device including a first source and a first drain of a P-channel-type MISFET formed on a Ge wafer, which are made of a compound having a Ge atom and a nickel atom, a compound having a Ge atom and a cobalt atom, or a compound having a Ge atom, a nickel atom, and a cobalt atom, and a second source and a second drain of an N-channel-type MISFET formed on the Group III-V compound semiconductor, which are made of a compound having a Group III atom, a Group V atom, and a nickel atom, a compound having a Group III atom, a Group V atom, and a cobalt atom, or a compound having a Group III atom, a Group V atom, a nickel atom, and a cobalt atom.
申请公布号 US2014091398(A1) 申请公布日期 2014.04.03
申请号 US201314099204 申请日期 2013.12.06
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;THE UNIVERSITY OF TOKYO 发明人 HATA MASAHIKO;YAMADA HISASHI;YOKOYAMA MASAFUMI;KIM SANGHYEON;ZHANG RUI;TAKENAKA MITSURU;TAKAGI SHINICHI;YASUDA TETSUJI
分类号 H01L27/092;H01L21/02;H01L21/8238 主分类号 H01L27/092
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