发明名称 Polysilicon Thin Film And Manufacturing Method Thereof, Array Substrate And Display Device
摘要 A polysilicon thin film and a manufacturing method thereof, an array substrate and a display device are disclosed. The manufacturing method of the polysilicon thin film comprises the following steps: forming a graphene layer and an amorphous silicon layer which are adjacent; forming polysilicon by way of crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics.
申请公布号 US2014091305(A1) 申请公布日期 2014.04.03
申请号 US201313963112 申请日期 2013.08.09
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 SUN TUO
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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