发明名称 |
Polysilicon Thin Film And Manufacturing Method Thereof, Array Substrate And Display Device |
摘要 |
A polysilicon thin film and a manufacturing method thereof, an array substrate and a display device are disclosed. The manufacturing method of the polysilicon thin film comprises the following steps: forming a graphene layer and an amorphous silicon layer which are adjacent; forming polysilicon by way of crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics. |
申请公布号 |
US2014091305(A1) |
申请公布日期 |
2014.04.03 |
申请号 |
US201313963112 |
申请日期 |
2013.08.09 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD. |
发明人 |
SUN TUO |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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