| 摘要 |
PROBLEM TO BE SOLVED: To provide a scale device that can acquire absolute position information in a measurement direction of a measurement axis, relative position information therein, a parallel movement amount in a direction orthogonal to the measurement direction, and angle information in an azimuth direction, and can use the absolute position information, the relative position information, the parallel movement amount, and the angle information as a reference scale for an operation error correction of a machine.SOLUTION: From a scale body 10 including an absolute track 11 having an absolute pattern magnetically recorded and incremental tracks 12A and 12B having an incremental signal pattern magnetically recorded on both sides of the absolute track at a tilt to a reverse direction with respect to the measurement direction, on the basis of respective detection outputs obtained by an absolute pattern detection head 21 and incremental signal detection heads 22A, 22A, 22B, and 22B, the absolute position information in the measurement direction of the measurement axis and the relative position information therein are generated, and information on the parallel movement amount in the direction orthogonal to the measurement direction and information on a rotation angle in the azimuth direction are generated. |
