发明名称 SCANNING MICROSCOPE
摘要 There is provided a scanning microscope so configured that when the position of the exit pupil of an imaging optical system and a position conjugate to the exit pupil change, the position of the rotation center of a scanned light flux is moved and follows the changed exit pupil position. A scanning microscope includes a light source, an objective lens, and a scan unit. The scan unit includes first to fourth deflectors, and the deflection angle of illumination light deflected off each of the first to fourth deflectors is so controlled that the pivotal point of the illumination light deflected off each of the first and second deflectors and the pivotal point of the illumination light deflected off each of the third and fourth deflectors substantially coincide with the exit pupil of the objective lens or a position conjugate to the exit pupil.
申请公布号 US2014092459(A1) 申请公布日期 2014.04.03
申请号 US201314040081 申请日期 2013.09.27
申请人 NIKON CORPORATION 发明人 MIZUTA MASAHIRO
分类号 G02B21/00 主分类号 G02B21/00
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