| 摘要 |
<p>Provided is a device for detecting the quality of a microelectronic packaging technology based on photo-thermal imaging, comprising an image acquisition device, an operating platform, a control device and a data processing device; wherein the image acquisition device comprises a support beam (1), a translational electric motor (2), an imaging probe (4) and a light emitter (5); the translational electric motor (2) is fixed to the lower side of the beam, and the imaging probe is perpendicularly fixed to a moving block in the translational electric motor (2); the light emitter (5) is connected to the moving block through an adjustable connection piece, and by adjusting the adjustable connection piece, light emitted by the light emitter will enter the imaging probe (4) after being reflected by a sample (6); the data processing device is used for data processing of light images and thermal images obtained by the image acquisition device so as to obtain the correlation coefficient and a coefficient of the mean squared error, comparing the correlation coefficient and a statistical coefficient of the mean squared error with preset threshold values, and obtaining a technology quality assessment according to the comparison result. The present invention can achieve the identification of residue particles and holes, material identification, and microporous depth measurement, and the detection and evaluation are more reliable.</p> |
