| 摘要 |
PROBLEM TO BE SOLVED: To provide a passage member having improved reliability, a heat exchanger using the same, and a semiconductor production apparatus.SOLUTION: A passage member includes a lid on which a workpiece is mounted, a bottom plate, and a plurality of sidewalls connected with the lid and bottom plate, and internally has a passage through which fluid flows. In the cross-sectional view orthogonal to the flow direction of the fluid, at least one of the plurality of sidewalls is widened from the bottom plate to the lid thus obtaining a passage member having improved reliability. |
