| 摘要 |
PROBLEM TO BE SOLVED: To provide an environmental system for controlling the environment of a gap between an optical assembly and a device.SOLUTION: A fluid barrier (254) is positioned closely to a device (30), and a liquid immersion fluid system (252) delivers a liquid immersion fluid (248) filling a gap (246). The liquid immersion fluid system (252) recovers a liquid immersion fluid existing directly between the fluid barrier (254) and the device (30). The fluid barrier (254) may include a discharge inlet positioned closely to the device (30), and the liquid immersion fluid system (252) may include a low pressure source communicating with the discharge inlet. An environmental system (26) includes a bearing fluid source for directing a bearing fluid between the fluid barrier (254) and the device (30), so that the fluid barrier (254) is supported for the device (30). |
