发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING TOUCH PANEL
摘要 <p>A photosensitive resin composition for ITO etching use, which comprises a binder polymer, a photopolymerizable compound, a photopolymerization initiator and a silane coupling agent, wherein the silane coupling agent comprises a silane compound having a mercaptoalkyl group.</p>
申请公布号 WO2014050567(A1) 申请公布日期 2014.04.03
申请号 WO2013JP74559 申请日期 2013.09.11
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 TAMADA HARUHISA;KIMURA NORIYO;TAKASAKI TOSHIHIKO
分类号 G03F7/075;G03F7/004;G03F7/027;G03F7/40;G06F3/041 主分类号 G03F7/075
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