发明名称 GLASS SUBSTRATE DRYING APPARATUS
摘要 The present invention relates to a glass substrate drying apparatus and, more specifically, to a glass substrate drying apparatus for supplying uniform hot air to a glass substrate to perform a drying process by controlling the positions and sizes of a nozzle hole in a pipe which supplies hot air to the glass substrate in a hot air chamber. According to the present invention, a glass substrate drying apparatus inside which glass substrates are supplied and arranged to be dried by hot air comprises a chamber in which a glass substrate is supplied and dried by hot air and which has an outlet from which the hot air used for drying the glass substrate is discharged; a pump supplying the hot air so that a hot air drying process can be performed inside the chamber; and a nozzle pipe connected to the pump, arranged in parallel to the glass substrate, and having multiple nozzles injecting the hot air to the glass substrate, wherein the farther the nozzles of the nozzle pipe become away from an inlet part connected to the pump and supplying air, the smaller distances between the nozzles of the nozzle pipe become.
申请公布号 KR20140040496(A) 申请公布日期 2014.04.03
申请号 KR20120107242 申请日期 2012.09.26
申请人 OPTO FINETECH CO., LTD. 发明人 JUNG, JUN YOUNG;KIM, EUN MO;KIM, JONG IN;KWON, HUI JU
分类号 F26B9/06;C03B27/00;F26B3/04;H01L23/15 主分类号 F26B9/06
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