| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of a vapor deposition apparatus and a heating device for vapor deposition, which have coiled heating wires.SOLUTION: A vapor deposition apparatus comprises on at least one surface of a substrate: a disc-shaped susceptor for supporting the substrate in such a manner as to enable formation of a deposit by vapor deposition; and a heating part for heating the susceptor. The heating part comprises: a coiled heating wire 10; a rod-shaped electrode 40 to which an end 12 of the heating wire 10 is connected; and a power supply part for supplying power to the heating wire 10 through the rod-shaped electrode 40. An axis of the heating wire 10 extends in a plane opposite to the susceptor. The rod-like electrode 40 comprises: a first part 41 to which the end of the heating wire 10 is connected; and a second part 42 to which power form the power supply part is supplied. The rod-like electrode 40 is formed in a curved shape in a manner such that the first part 41 extends in the plane opposite to the susceptor and the second part 42 extends in a direction crossing the plane. |
