发明名称 THERMAL ELECTROMAGNETIC WAVE DETECTION DEVICE AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a thermal electromagnetic wave detection device capable of increasing detection accuracy by preventing thermal crosstalk between neighboring pixels requiring no mechanical chopper.SOLUTION: A thermal electromagnetic wave detection device 300 includes: plural thermal electromagnetic wave detection elements 220 each of which is disposed in a matrix state on a support film 210 which is separated from substrate 100 being interposed by a vacant portion 102; plural external force generating sections 290 for generating an external force for bringing the support film into contact with the substrate; drive circuits 310 and 320 for reading detection signals from the thermal electromagnetic wave detection elements for each of the thermal electromagnetic wave detection elements included in the same line; and an external force generation control section 296 that controls plural external force generating sections. The external force generation control section controls the support film corresponding to at least read out element in the same line to be separated from the substrate and the support film corresponding to non-read out element included in another line neighboring to each other in a line direction with respect to the read out element to be brought into contact with the substrate.
申请公布号 JP2014059202(A) 申请公布日期 2014.04.03
申请号 JP20120204040 申请日期 2012.09.18
申请人 SEIKO EPSON CORP 发明人 KAMIKAWA TAKETOMI;TAKIZAWA JUN
分类号 G01J1/02;G01J1/42;H01L27/146;H04N5/32;H04N5/369 主分类号 G01J1/02
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