PEELING DEVICE, PEELING SYSTEM, AND PEELING METHOD

摘要

PROBLEM TO BE SOLVED: To improve the efficiencies of peeling process.SOLUTION: A peeling device comprises: a first holding part; a second holding part; and a movement mechanism. The first holding part holds a support substrate of a superposed substrate with DF from above. The second holding part holds a substrate to be processed of the superposed substrate with DF via a dicing tape from below. The movement mechanism moves the first holding part in a direction away from the second holding part.