An adhesion device (1) for adhering a substrate (2) and a support body (3) via an adhesion layer (4) is provided with support body holding members (42). Holding tools (42a) of the support body holding members (42) hold the support body (3) with the oblique surface parts (contact members (42b)) of the holding tools (42a) in a manner such that the support body (3) does not come into contact with the surface of the substrate (2) to which the support body (3) is to be adhered. The adhesion device (1) adheres, to the substrate (2), the support body (3) that is held so as to not come into contact with the surface.