发明名称 |
DEVELOPABLE BOTTOM ANTI-REFLECTIVE COATING |
摘要 |
The present invention provides a cross-linking agent capable of preventing formation of scum from a bottom anti-reflective coating, and also provides a composition for forming a bottom anti-reflection coating containing the agent. The cross-linking agent is a nitrogen-containing aromatic compound having at least one vinyloxy group or N-methoxymethylamide group, and the composition contains the cross-linking agent. The cross-linking agent of the formula (1) can be produced by reaction of a nitrogen-containing aromatic compound, a halogen compound having a vinyloxy group or N-methoxymethylamide group and a basic compound. |
申请公布号 |
WO2014049420(A2) |
申请公布日期 |
2014.04.03 |
申请号 |
WO2013IB02121 |
申请日期 |
2013.09.26 |
申请人 |
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L. |
发明人 |
NAKASUGI, SHIGEMASA;MIYAZAKI, SHINJI;PADMANABAN, MUNIRATHNA;DIOSES, D., ALBERTO |
分类号 |
C07D251/30 |
主分类号 |
C07D251/30 |
代理机构 |
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