ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress a characteristic deterioration of an electronic element 5 by adsorbing gas in a cavity 4 by means of a storage metal film 7 arranged in the cavity 4 and reducing a pressure variation in the cavity 4.SOLUTION: An electronic device 1 includes: a base 2; a lid 3 anodically bonded to the base 2; the electronic element 5 housed in the cavity 4 formed between the lid 3 and the base 2; a bonding film 9 arranged on the bonding plane of the base 2 and the lid 3; and the storage metal film 7 with a gas adsorption property arranged on the surface of the lid 3 facing the cavity 4. The storage metal film 7 adsorbs gas generated during the anodic bonding, and the storage metal film 7 hardly corrodes and does not generates gas, which can reduce a pressure variation in the cavity 4 to suppress a characteristic deterioration of the electronic element 5 housed inside.