| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating an electrostatic latent image capable of evaluating ability of forming the electrostatic latent image of a photoreceptor sample in a short time with high resolution.SOLUTION: A method for evaluating an electrostatic latent image measures and evaluates the electrostatic latent image on a photoreceptor sample 20 by detection signals obtained by irradiating the photoreceptor sample 20 with a charged particle beam. The method comprises: a charging step for irradiating the photoreceptor sample 20 with an electron beam to charge in a vacuum; and a discharging step for irradiating the charged photoreceptor sample 20 with light to discharge. After repeating the charging step and the discharging step to fatigue the photoreceptor sample 20, the photoreceptor sample 20 is charged and exposed at the same position as a position where the charging step and the discharging step are performed, to form and evaluate an electrostatic latent image pattern. |
