发明名称 A Probe Pin and a Manufacturing Method of the same
摘要 PURPOSE: A probe pin and a manufacturing method thereof are provided to reduce the time for manufacturing a probe pin and to improve productivity by recycling a mold. CONSTITUTION: A base substrate including a probe tip region and a probe beam region is provided. A first photoresist pattern layer is formed on the front surface of the base substrate except the probe tip region and the probe beam region. A first metal layer(230) is formed in the probe tip region and the probe beam region. The first metal layer comprises a probe tip(230a) formed on the probe tip region and a first probe beam(230b) formed on the probe beam region. A second photoresist pattern layer for exposing the probe beam region is formed. A second metal layer(250) is formed in the exposed probe beam region.
申请公布号 KR101379426(B1) 申请公布日期 2014.04.03
申请号 KR20110114002 申请日期 2011.11.03
申请人 发明人
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
代理机构 代理人
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