Acoustic structure comprising at least one resonator and at least one capacitor jointly built into a single piezoelectric or ferroelectric layer

摘要

The acoustic structure has a stack of layers that is provided with an active layer of piezoelectric material or of ferroelectric material. A resonator which is frequency tunable is produced by a first subset of layers of the stack comprising an active layer and two electrodes. An integrated capacitor is produced by a second subset of layers comprising an active layer and two electrodes. The subsets of layers are distinguished by a modification of layers, to exhibit different resonant frequencies. An upper passivation layer is made of silicon dioxide.