发明名称 |
Polysilicon thin film and manufacturing method thereof, array substrate and display device |
摘要 |
<p>There are disclosed a polysilicon thin film and a manufacturing method thereof, an array substrate and a display device. The manufacturing method of the polysilicon thin film comprises the following steps: forming a graphene layer and an amorphous silicon layer which are adjacent; forming polysilicon by way of crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics.</p> |
申请公布号 |
EP2713401(A1) |
申请公布日期 |
2014.04.02 |
申请号 |
EP20130174324 |
申请日期 |
2013.06.28 |
申请人 |
BOE TECHNOLOGY GROUP CO. LTD. |
发明人 |
SUN, TUO |
分类号 |
H01L21/02;H01L27/12;H01L29/66;H01L29/786 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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