chemical vapor deposition for mist injection over substrate transport and method for fabricating transparent conducting oxide layer using the same and method for fabricating CIS-based thin film solar battery using the same

摘要

PURPOSE: A substrate movable type chemical vapor deposition method for mist injection transport and a manufacturing method for a transparent conducting oxide layer using the same and a manufacturing method for a CIS-based thin film solar cell are provided to reduce maintenance costs by manufacturing a window layer with an non-vacuum process. CONSTITUTION: A raw material solution of a metal oxide layer(3) is manufactured. Mist gas(4) including particles of a metal oxide layer is generated through ultrasonic vibration. The generated mist gas is moved to a nozzle(5) on the top of a reactor. The mist gas is emitted to a substrate(2). A metal oxide layer is layered through a diffusion and thermal decomposition chemical reaction of the mist gas.