| 摘要 |
<p>The present invention realizes a specimen holder for a charged-particle beam apparatus capable for moving at least one specimen support, and for obtaining the image of the transmission electron microscopy, or the like of all specimens arranged in the specimen holder with high spatial resolution. The retainer plates (42, 43) are put on the specimen supports (40, 41) after the specimen supports (40, 41) are set on the specimen stages (30, 31) at the end portion of the specimen holder (18) respectively. Thereafter, the specimen supports (40, 41) and the retainer plates (42, 43) are fixed to the specimen stages (30, 31). The vibration damping mechanism (46) is arranged on the end portion side of the specimen holder (18). The vibration of the specimen support (41) can be prevented or restricted by the condition that the vibration damping mechanism (46) contacts to the specimen support (41). Accordingly, the Transmission Electron Microscopy image can be obtained with high spatial resolution power.</p> |
