发明名称 |
METHOD AND APPARATUS FOR STABILIZING AND TUNING THE BANDWIDTH OF LASER LIGHT |
摘要 |
A method and apparatus is disclosed that may comprise an ultraviolet light source; an optical element within an optical path of the light source mounted on an optical element mount; a vibration damping mechanism operatively connected to the optical element or to the mount which may comprise a wire mesh pad. The optical element may comprise a center wavelength selection optical element, which may comprise a grating, a mirror, or a prism. The vibration damping mechanism may comprise the wire mesh pad comprising an elastic interface between a driving mechanism lever arm operable to move the optical element or the mount and a driving lever arm actuator. The vibration damping mechanism may comprise a mass damping mechanism comprising a mounting plate connected to the optical element or to the mount; a damping mass; the wire mesh pad comprising an elastic interface between the mounting plate and the damping mass. |
申请公布号 |
EP2137798(A4) |
申请公布日期 |
2014.04.02 |
申请号 |
EP20080742695 |
申请日期 |
2008.04.09 |
申请人 |
CYMER, INC. (A NEVADA CORPORATION) |
发明人 |
PARTLO, WILLIAM, N.;JACQUES, ROBERT, N.;O'BRIEN, KEVIN, M.;ISHIHARA, TOSHIHIKO |
分类号 |
H01S3/22;G02B27/64;H01S3/1055;H01S3/137;H01S3/139;H01S3/225 |
主分类号 |
H01S3/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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