FLATNESS AUTO COMPENSATION DEVICE AND METHOD THEREOF

摘要

A device and a method for automatically compensating for flatness are disclosed. The disclosed device for automatically compensating for flatness comprises: a stage where a substrate to be processed by a processing unit is seated; a measuring unit which measures the measurement height of at least three measuring points respectively that are preset on the substrate or the stage; a measurement operating unit which moves either the stage or the measuring unit horizontally to a virtual xy-plane; a control unit which converts the measurement height into an elevation displacement amount (displayed as an x-axis direction slant and a y-axis direction slant of the substrate or the stage against the virtual xy-plane) for a preset reference height; and an elevation operating unit which moves the processing unit vertically to the virtual xy-plane depending on the elevation displacement amount. The control unit is characterized by controlling the vertical moving speed of the processing unit depending on the elevation displacement amount displayed as a slant, the processing time of the substrate, and the size of the substrate.