发明名称 PROBE DEVICE CAPABLE OF BEING USED FOR PLURAL KINDS OF TESTERS
摘要 A probe device(10) has an insert ring(14) and a base card holder(13) that match a pogo ring(15) and probe card(17) for plural kinds of testers. The base card holder (13) is formed to have a larger diameter than a card holder(20) for the probe card(17). A conversion ring(16) links the connection between the card holder(20) and the base card holder(13).
申请公布号 EP1736787(A4) 申请公布日期 2014.04.02
申请号 EP20050726695 申请日期 2005.03.16
申请人 TOKYO ELECTRON LIMITED 发明人 NOGUCHI, MASAYUKI
分类号 G01R1/06;G01R31/28;G01R1/073;H01L21/66 主分类号 G01R1/06
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