| 摘要 |
An apparatus for supplying evaporation materials and a deposition apparatus comprising the same are disclosed. The apparatus for supplying the evaporation materials comprises: a housing with a hollow portion therein; a supply container which is received in the hollow portion, is rotatably coupled to the inner wall of the hollow portion, and contains the evaporation materials inside; an outlet which is connected to the supply container and in which the evaporation materials are discharged; and a screw which is provided in the supply container and mixes the evaporation materials. The apparatus for supplying the evaporation materials can continuously charge the evaporation materials to an evaporation source while maintaining a vacuum atmosphere of a vacuum chamber. |
