| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a ZnO film doped with Eu by which stable red light having a high luminous efficiency is obtained. SOLUTION: First, in a first step, a thin film 102 composed of ZnO doped with Eu is formed on a substrate 101 with a sputtering technique in which H<SB POS="POST">2</SB>O gas is introduced. Next, in a second step, the thin film is heated. Since H<SB POS="POST">2</SB>O gas is used, H atoms is introduced into the film formed. As a result, it becomes possible to form ZnO added with Eu which emits light mainly in the vicinity of 620 nm. Thus, it becomes possible to obtain stable red light having a high luminous efficiency by using the ZnO added with Eu. COPYRIGHT: (C)2012,JPO&INPIT |
