SEMICONDUCTOR DEVICE INSPECTION APPARATUS

摘要

An apparatus for testing elements according to an embodiment of the present invention configures a shuttle plate to be able to attach and detach at a plate fixation unit by the simple operation of the plate detachable unit, wherein the shuttle plate transfers the elements transferred from a loading unit to a test unit and transfers the elements transferred from the test unit to an unloading unit. Therefore the shuttle plate on which the elements are mounted can be replaced easily when the type of element to be tested, especially the size of the element, changes.